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Negative Ion Etching of Al-Si-Cu by Employing a Magnetic Filter in Halogen Plasmas
Negative Ion Etching of Al-Si-Cu by Employing a Magnetic Filter in Halogen Plasmas
Detailed Information
- Material Type
- 기사
- ISSN
- 12259438
- Title/Author
- Negative Ion Etching of Al-Si-Cu by Employing a Magnetic Filter in Halogen Plasmas / 공저 Bong-Ju Lee,Yasuhiro Horiike
- Publish Info
- 서울 : 대한금속.재료학회, 2002.
- Material Info
- pp. 85-88
- Added Entry-Personal Name
- Bong-Ju Lee,Yasuhiro Horiike
- Host Item Entry
- Metals and Materials : VOL.8 NO.1 (2002 FEBRUARY) 2002, 02
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017576
MARC
008000107s2002 ULKa a ENG■022 ▼a12259438
■245 ▼aNegative Ion Etching of Al-Si-Cu by Employing a Magnetic Filter in Halogen Plasmas▼d공저 Bong-Ju Lee,Yasuhiro Horiike
■260 ▼a서울▼b대한금속.재료학회▼c2002.
■300 ▼app. 85-88
■653 ▼aNEGATIVE▼aION▼aETCHING▼aALSICU▼aEMPLOYING▼aMAGNETIC▼aFILTER▼aHALOGEN▼aPLASMAS
■700 ▼aBong-Ju Lee,Yasuhiro Horiike
■773 ▼tMetals and Materials▼gVOL.8 NO.1 (2002 FEBRUARY)▼d2002, 02
■SIS ▼aS009190▼b60013551▼h8▼s2
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