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Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions
Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions
Detailed Information
- Material Type
- 기사
- ISSN
- 12259438
- Title/Author
- Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions / 저 Gwiy-Sang Chung
- Publish Info
- 서울 : 대한금속.재료학회, 2001.
- Material Info
- pp. 643-649
- Index Term-Uncontrolled
- ANISOTROPIC ETCHING ELECTROCHEMICAL ETCHSTOP PROPERTIES SILICON TMAHIPAPYRAZINE SOLUTIONS
- Added Entry-Personal Name
- Gwiy-Sang Chung
- Host Item Entry
- Metals and Materials : VOL.7 NO.6 (2001 DECEMBER) 2001, 12
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017535
MARC
008000107s2001 ULKa a ENG■022 ▼a12259438
■245 ▼aAnisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions▼d저 Gwiy-Sang Chung
■260 ▼a서울▼b대한금속.재료학회▼c2001.
■300 ▼app. 643-649
■653 ▼aANISOTROPIC▼aETCHING▼aELECTROCHEMICAL▼aETCHSTOP▼aPROPERTIES▼aSILICON▼aTMAHIPAPYRAZINE▼aSOLUTIONS
■700 ▼aGwiy-Sang Chung
■773 ▼tMetals and Materials▼gVOL.7 NO.6 (2001 DECEMBER)▼d2001, 12
■SIS ▼aS009189▼b60013551▼h8▼s2
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