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Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions
Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions
Detailed Information
- 자료유형
- 기사
- ISSN
- 12259438
- 서명/저자
- Anisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions / 저 Gwiy-Sang Chung
- 발행사항
- 서울 : 대한금속.재료학회, 2001.
- 형태사항
- pp. 643-649
- 기타저자
- Gwiy-Sang Chung
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017535
MARC
008000107s2001 ULKa a ENG■022 ▼a12259438
■245 ▼aAnisotropic Etching and Electrochemical Etch-Stop Properties of Silicon in TMAH:IPA:Pyrazine Solutions▼d저 Gwiy-Sang Chung
■260 ▼a서울▼b대한금속.재료학회▼c2001.
■300 ▼app. 643-649
■653 ▼aANISOTROPIC▼aETCHING▼aELECTROCHEMICAL▼aETCHSTOP▼aPROPERTIES▼aSILICON▼aTMAHIPAPYRAZINE▼aSOLUTIONS
■700 ▼aGwiy-Sang Chung
■773 ▼tMetals and Materials▼gVOL.7 NO.6 (2001 DECEMBER)▼d2001, 12
■SIS ▼aS009189▼b60013551▼h8▼s2
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