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The Effects of Vacuum Annealing on the Film Properties of Titanium Boride (TiBx) Grown on (100)Si Substrate
The Effects of Vacuum Annealing on the Film Properties of Titanium Boride (TiBx) Grown on ...
The Effects of Vacuum Annealing on the Film Properties of Titanium Boride (TiBx) Grown on (100)Si Substrate

Detailed Information

자료유형  
 기사
ISSN  
12259438
서명/저자  
The Effects of Vacuum Annealing on the Film Properties of Titanium Boride (TiBx) Grown on (100)Si Substrate / 공저 Young-Ki Lee,Jung-Yuel Kim,You-Kee Lee
발행사항  
서울 : 대한금속.재료학회, 2001.
형태사항  
pp. 359-366
키워드  
EFFECTS VACUUM ANNEALING FILM PROPERTIES TITANIUM BORIDE TIBX GROWN 100SI SUBSTRATE
기타저자  
Young-Ki Lee,Jung-Yuel Kim,You-Kee Lee
기본자료저록  
Metals and Materials : VOL.7 NO.4 (2001 AUGUST) 2001, 08
모체레코드  
모체정보확인
Control Number  
kjul:60017423

MARC

 008000107s2001        ULKa    a                          ENG
■022    ▼a12259438
■245    ▼aThe  Effects  of  Vacuum  Annealing  on  the  Film  Properties  of  Titanium  Boride  (TiBx)  Grown  on  (100)Si  Substrate▼d공저  Young-Ki  Lee,Jung-Yuel  Kim,You-Kee  Lee
■260    ▼a서울▼b대한금속.재료학회▼c2001.
■300    ▼app.  359-366
■653    ▼aEFFECTS▼aVACUUM▼aANNEALING▼aFILM▼aPROPERTIES▼aTITANIUM▼aBORIDE▼aTIBX▼aGROWN▼a100SI▼aSUBSTRATE
■700    ▼aYoung-Ki  Lee,Jung-Yuel  Kim,You-Kee  Lee
■773    ▼tMetals  and  Materials▼gVOL.7  NO.4  (2001  AUGUST)▼d2001,  08
■SIS    ▼aS009187▼b60013551▼h8▼s2

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