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Properties of Chemically Vapor Deposited Blanket Tungsten Films on TiN Glue Layers Prepared by Chemical Vapor Deposition
Properties of Chemically Vapor Deposited Blanket Tungsten Films on TiN Glue Layers Prepared by Chemical Vapor Deposition
상세정보
- 자료유형
- 기사
- ISSN
- 12259438
- 서명/저자
- Properties of Chemically Vapor Deposited Blanket Tungsten Films on TiN Glue Layers Prepared by Chemical Vapor Deposition / 공저 Youn-Soo Kim,Jun Ki Kim,Jin Won Park
- 발행사항
- 서울 : 대한금속.재료학회, 2000.
- 형태사항
- pp. 577-582
- 키워드
- PROPERTIES CHEMICALLY VAPOR DEPOSITED BLANKET TUNGSTEN FILMS GLUE LAYERS PREPARED CHEMICAL DEPOSITION
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017273
MARC
008000106s2000 ULKa a ENG■022 ▼a12259438
■245 ▼aProperties of Chemically Vapor Deposited Blanket Tungsten Films on TiN Glue Layers Prepared by Chemical Vapor Deposition▼d공저 Youn-Soo Kim,Jun Ki Kim,Jin Won Park
■260 ▼a서울▼b대한금속.재료학회▼c2000.
■300 ▼app. 577-582
■653 ▼aPROPERTIES▼aCHEMICALLY▼aVAPOR▼aDEPOSITED▼aBLANKET▼aTUNGSTEN▼aFILMS▼aGLUE▼aLAYERS▼aPREPARED▼aCHEMICAL▼aDEPOSITION
■700 ▼aYoun-Soo Kim,Jun Ki Kim,Jin Won Park
■773 ▼tMetals and Materials▼gVOL.6 NO.6 (2000 DECEMBER)▼d2000, 12
■SIS ▼aS009183▼b60013551▼h8▼s2
