서브메뉴
검색
Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD
Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD
Detailed Information
- Material Type
- 기사
- ISSN
- 12259438
- Title/Author
- Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD / 공저 Kyung-Mun Byun,Won-Jong Lee
- Publish Info
- 서울 : 대한금속.재료학회, 2000.
- Material Info
- pp. 155-160
- Index Term-Uncontrolled
- DEPOSITION CHARACTERISTICS DIELECTRIC CONSTANT SIOF FILMS PREPARED ECR PECVD
- Added Entry-Personal Name
- Kyung-Mun Byun,Won-Jong Lee
- Host Item Entry
- Metals and Materials : VOL.6 NO.2 (2000 APRIL) 2000, 04
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60017133
MARC
008000104s2000 ULKa a ENG■022 ▼a12259438
■245 ▼aDeposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD▼d공저 Kyung-Mun Byun,Won-Jong Lee
■260 ▼a서울▼b대한금속.재료학회▼c2000.
■300 ▼app. 155-160
■653 ▼aDEPOSITION▼aCHARACTERISTICS▼aDIELECTRIC▼aCONSTANT▼aSIOF▼aFILMS▼aPREPARED▼aECR▼aPECVD
■700 ▼aKyung-Mun Byun,Won-Jong Lee
■773 ▼tMetals and Materials▼gVOL.6 NO.2 (2000 APRIL)▼d2000, 04
■SIS ▼aS009179▼b60013551▼h8▼s2
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
