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Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD
Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD / ...
Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD

Detailed Information

자료유형  
 기사
ISSN  
12259438
서명/저자  
Deposition Characteristics of Low Dielectric Constant SiOF Films Prepared by ECR PECVD / 공저 Kyung-Mun Byun,Won-Jong Lee
발행사항  
서울 : 대한금속.재료학회, 2000.
형태사항  
pp. 155-160
키워드  
DEPOSITION CHARACTERISTICS DIELECTRIC CONSTANT SIOF FILMS PREPARED ECR PECVD
기타저자  
Kyung-Mun Byun,Won-Jong Lee
기본자료저록  
Metals and Materials : VOL.6 NO.2 (2000 APRIL) 2000, 04
모체레코드  
모체정보확인
Control Number  
kjul:60017133

MARC

 008000104s2000        ULKa    a                          ENG
■022    ▼a12259438
■245    ▼aDeposition  Characteristics  of  Low  Dielectric  Constant  SiOF  Films  Prepared  by  ECR  PECVD▼d공저  Kyung-Mun  Byun,Won-Jong  Lee
■260    ▼a서울▼b대한금속.재료학회▼c2000.
■300    ▼app.  155-160
■653    ▼aDEPOSITION▼aCHARACTERISTICS▼aDIELECTRIC▼aCONSTANT▼aSIOF▼aFILMS▼aPREPARED▼aECR▼aPECVD
■700    ▼aKyung-Mun  Byun,Won-Jong  Lee
■773    ▼tMetals  and  Materials▼gVOL.6  NO.2  (2000  APRIL)▼d2000,  04
■SIS    ▼aS009179▼b60013551▼h8▼s2

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