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정전기력 구동 마이크로 액츄에이터를 이용한 Si 소재 탄성특성의 온도의존성 평가
정전기력 구동 마이크로 액츄에이터를 이용한 Si 소재 탄성특성의 온도의존성 평가 / 정성훈,이...
정전기력 구동 마이크로 액츄에이터를 이용한 Si 소재 탄성특성의 온도의존성 평가

Detailed Information

자료유형  
 기사
ISSN  
02533847
서명/저자  
정전기력 구동 마이크로 액츄에이터를 이용한 Si 소재 탄성특성의 온도의존성 평가 / 정성훈,이세호,정증현 공저
발행사항  
서울 : 대한금속.재료학회, 2002.
형태사항  
pp. 897-902
키워드  
정전기 구동 마이크로 이용 탄성 온도 의존성 평가
기타저자  
정성훈,이세호,정증현
기본자료저록  
대한금속.재료학회지 : Vol.40 No.8 2002 2002, 08
모체레코드  
모체정보확인
Control Number  
kjul:60016531

MARC

 008030724s2002        ULKa    a                          KOR
■022    ▼a02533847
■245    ▼a정전기력  구동  마이크로  액츄에이터를  이용한  Si  소재  탄성특성의  온도의존성  평가▼d정성훈,이세호,정증현  공저
■260    ▼a서울▼b대한금속.재료학회▼c2002.
■300    ▼app.  897-902
■653    ▼a정전기▼a구동▼a마이크로▼a이용▼a탄성▼a온도▼a의존성▼a평가
■700    ▼a정성훈,이세호,정증현
■773    ▼t대한금속.재료학회지▼gVol.40  No.8  2002▼d2002,  08
■SIS    ▼aS009141▼b60013425▼h8▼s2

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