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ITO(Indium Tin Oxide) 박막의 대기압 저온 플라스마 토치에 의한 식각
ITO(Indium Tin Oxide) 박막의 대기압 저온 플라스마 토치에 의한 식각 / 이봉주 저
ITO(Indium Tin Oxide) 박막의 대기압 저온 플라스마 토치에 의한 식각

Detailed Information

자료유형  
 기사
ISSN  
02533847
서명/저자  
ITO(Indium Tin Oxide) 박막의 대기압 저온 플라스마 토치에 의한 식각 / 이봉주 저
발행사항  
서울 : 대한금속.재료학회, 2002.
형태사항  
pp. 458-460
키워드  
ITOINDIUM OXIDE 박막 대기압 저온 토치 식각
기타저자  
이봉주
기본자료저록  
대한금속.재료학회지 : Vol.40 No.4 2002 2002, 04
모체레코드  
모체정보확인
Control Number  
kjul:60016441

MARC

 008030724s2002        ULKa    a                          KOR
■022    ▼a02533847
■245    ▼aITO(Indium  Tin  Oxide)  박막의  대기압  저온  플라스마  토치에  의한  식각▼d이봉주  저
■260    ▼a서울▼b대한금속.재료학회▼c2002.
■300    ▼app.  458-460
■653    ▼aITOINDIUM▼aOXIDE▼a박막▼a대기압▼a저온▼a토치▼a식각
■700    ▼a이봉주
■773    ▼t대한금속.재료학회지▼gVol.40  No.4  2002▼d2002,  04
■SIS    ▼aS009137▼b60013425▼h8▼s2

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