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DC 마그네트론 스퍼터링으로 제조된 MOS₂박막의 밀착력 및 내마모 특성
DC 마그네트론 스퍼터링으로 제조된 MOS₂박막의 밀착력 및 내마모 특성 / 안영환, 김선규 공저
DC 마그네트론 스퍼터링으로 제조된 MOS₂박막의 밀착력 및 내마모 특성

Detailed Information

자료유형  
 기사
ISSN  
02533847
서명/저자  
DC 마그네트론 스퍼터링으로 제조된 MOS₂박막의 밀착력 및 내마모 특성 / 안영환, 김선규 공저
발행사항  
서울 : 대한금속.재료학회, 2002.
형태사항  
pp. 197-205
키워드  
DC 스퍼터링 으로 제조 MOS₂박막의 밀착 내마모
기타저자  
안영환, 김선규
기본자료저록  
대한금속.재료학회지 : Vol.40 No.2 2002 2002, 02
모체레코드  
모체정보확인
Control Number  
kjul:60016383

MARC

 008030724s2002        ULKa    a                          KOR
■022    ▼a02533847
■245    ▼aDC  마그네트론  스퍼터링으로  제조된  MOS₂박막의  밀착력  및  내마모  특성▼d안영환,  김선규  공저
■260    ▼a서울▼b대한금속.재료학회▼c2002.
■300    ▼app.  197-205
■653    ▼aDC▼a스퍼터링▼a으로▼a제조▼aMOS₂박막의▼a밀착▼a내마모
■700    ▼a안영환,  김선규
■773    ▼t대한금속.재료학회지▼gVol.40  No.2  2002▼d2002,  02
■SIS    ▼aS009135▼b60013425▼h8▼s2

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