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Laser chemical processing for microelectronics
Laser chemical processing for microelectronics
Detailed Information
- 자료유형
- 단행본
- ISBN
- 0521322545
- 청구기호
- 569.3 I12l
- 저자명
- Ibbs, KG
- 서명/저자
- Laser chemical processing for microelectronics / ed. by K.G. Ibbs , R.M. Osgood.
- 발행사항
- New York : Cambridge University Press, 1989.
- 형태사항
- 172 p. : ill. ; 24 cm.
- 기타저자
- Osgood, RM
- 가격
- 9000
- Control Number
- kjul:50052674
MARC
008020619s1989 ulk kor■020 ▼a0521322545
■035 ▼aKRIC01750068
■090 ▼a569.3▼bI12l
■1001 ▼aIbbs, KG
■24510▼aLaser chemical processing for microelectronics▼ded. by K.G. Ibbs▼eR.M. Osgood.
■260 ▼aNew York▼bCambridge University Press▼c1989.
■300 ▼a172 p.▼bill.▼c24 cm.
■7001 ▼aOsgood, RM
■9500 ▼b9000
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