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MEMS98 : Micro electro mechanical systems : (An)Investigation of micro structures, sensors, actuators, machines and systems
MEMS98 : Micro electro mechanical systems : (An)Investigation of micro structures, sensors, actuators, machines and systems
Detailed Information
- Material Type
- 단행본
- ISBN
- 078034412X
- Callnumber
- 550 I22m
- Author
- IEEE
- Title/Author
- MEMS98 : Micro electro mechanical systems : (An)Investigation of micro structures, sensors, actuators, machines and systems / ed. by IEEE.
- Publish Info
- New York : Institute of Electrical and Electr, 1998.
- Material Info
- xxx, 660 p. : ill. ; 27 cm.
- General Note
- January 25-29, 1998 Heidlberg, Germany
- Price Info
- 58000
- Control Number
- kjul:50047318
MARC
008010718s1998 us eng■020 ▼a078034412X
■090 ▼a550▼bI22m
■1001 ▼aIEEE
■24510▼aMEMS98▼bMicro electro mechanical systems▼b(An)Investigation of micro structures, sensors, actuators, machines and systems▼ded. by IEEE.
■260 ▼aNew York▼bInstitute of Electrical and Electr▼c1998.
■300 ▼axxx, 660 p.▼bill.▼c27 cm.
■50000▼aJanuary 25-29, 1998 Heidlberg, Germany
■9500 ▼b58000
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