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Handbook of plasma processing technology : Fundamentals, etching, deposition, and surface interactions
Handbook of plasma processing technology : Fundamentals, etching, deposition, and surface interactions
Detailed Information
- 자료유형
- 참고자료
- ISBN
- 0815512201
- 청구기호
- 429.1 R837h
- 서명/저자
- Handbook of plasma processing technology : Fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel , Jerome J. Cuomo , William D. Westwood.
- 발행사항
- Park Ridge, New Jersey : Noyes Publications, 1989.
- 형태사항
- xxiii,523 p. : tables ; 23 cm.
- 서지주기
- Includes bibliographical references.
- 기타저자
- Cuomo, Jerome J.
- 기타저자
- Westwood, William D.
- 가격
- 21000
- Control Number
- kjul:50028530
MARC
008010911s1989 us 000 eng■005 19800102042732.0
■020 ▼a0815512201
■035 ▼aKRIC00358962
■090 ▼a429.1▼bR837h
■1001 ▼aRossnagel, Stephen M.
■24510▼aHandbook of plasma processing technology▼bFundamentals, etching, deposition, and surface interactions▼dedited by Stephen M. Rossnagel▼eJerome J. Cuomo▼eWilliam D. Westwood.
■260 ▼aPark Ridge, New Jersey▼bNoyes Publications▼c1989.
■300 ▼axxiii,523 p.▼btables▼c23 cm.
■504 ▼aIncludes bibliographical references.
■7001 ▼aCuomo, Jerome J.
■7001 ▼aWestwood, William D.
■9500 ▼b21000
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