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Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceeding...
Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan

Detailed Information

자료유형  
 단행본
ISBN  
1558994122
청구기호  
569.3 C526a
저자명  
Cheung, Robin
서명/저자  
Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan / editors Robin Cheung...[et al].
발행사항  
Warrendale,PA : Materials Research Society, 1998.
형태사항  
xviii,765 p. : illus. ; 23 cm.
주기사항  
"Sponsored by continuing education in engineering, university extension, university of california at berkeley, U.S.A."
기타저자  
Klein, Jeffrey
기타저자  
Kobayashi, Nobuyoshi
기타저자  
Murakami, Masanori
기타저자  
Tsubouchi, Kazuo
가격  
54000
Control Number  
kjul:50024744

MARC

 008011011s1998        us  a                    000      eng
■005    20011011165558.0
■020    ▼a1558994122
■090    ▼a569.3▼bC526a
■1001  ▼aCheung,  Robin
■24510▼aAdvanced  metallization  and  interconnect  systems  for  ULSI  applications  in  1997▼bProceedings  of  the  conference  held  September  30-October  2,  1997  in  San  Diego,  California;  Parallel  session  was  held  October  21-22,  1997  in  Tokyo,  Japan▼deditors  Robin  Cheung...[et  al].
■260    ▼aWarrendale,PA▼bMaterials  Research  Society▼c1998.
■300    ▼axviii,765  p.▼billus.▼c23  cm.
■50000▼a"Sponsored  by  continuing  education  in  engineering,  university  extension,  university  of  california  at  berkeley,  U.S.A."
■7001  ▼aKlein,  Jeffrey
■7001  ▼aKobayashi,  Nobuyoshi
■7001  ▼aMurakami,  Masanori
■7001  ▼aTsubouchi,  Kazuo
■9500  ▼b54000

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