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Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan
Detailed Information
- Material Type
- 단행본
- Date and Time of Latest Transaction
- 20011011165558.0
- ISBN
- 1558994122
- Callnumber
- 569.3 C526a
- Author
- Cheung, Robin
- Title/Author
- Advanced metallization and interconnect systems for ULSI applications in 1997 : Proceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan / editors Robin Cheung...[et al].
- Publish Info
- Warrendale,PA : Materials Research Society, 1998.
- Material Info
- xviii,765 p. : illus. ; 23 cm.
- General Note
- "Sponsored by continuing education in engineering, university extension, university of california at berkeley, U.S.A."
- Added Entry-Personal Name
- Klein, Jeffrey
- Added Entry-Personal Name
- Kobayashi, Nobuyoshi
- Added Entry-Personal Name
- Murakami, Masanori
- Added Entry-Personal Name
- Tsubouchi, Kazuo
- Price Info
- 54000
- Control Number
- kjul:50024744
MARC
008011011s1998 us a 000 eng■005 20011011165558.0
■020 ▼a1558994122
■090 ▼a569.3▼bC526a
■1001 ▼aCheung, Robin
■24510▼aAdvanced metallization and interconnect systems for ULSI applications in 1997▼bProceedings of the conference held September 30-October 2, 1997 in San Diego, California; Parallel session was held October 21-22, 1997 in Tokyo, Japan▼deditors Robin Cheung...[et al].
■260 ▼aWarrendale,PA▼bMaterials Research Society▼c1998.
■300 ▼axviii,765 p.▼billus.▼c23 cm.
■50000▼a"Sponsored by continuing education in engineering, university extension, university of california at berkeley, U.S.A."
■7001 ▼aKlein, Jeffrey
■7001 ▼aKobayashi, Nobuyoshi
■7001 ▼aMurakami, Masanori
■7001 ▼aTsubouchi, Kazuo
■9500 ▼b54000
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