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Semiconductor Cleaning Technology/1989
Semiconductor Cleaning Technology/1989
Detailed Information
- 자료유형
- 참고자료
- 청구기호
- 569.806 R987s
- 서명/저자
- Semiconductor Cleaning Technology/1989 / Richard E. Novak.
- 발행사항
- U.S.A. : The Electrochemical Society, 1990.
- 형태사항
- 399 p. ; 23 cm.
- 가격
- 9500
- Control Number
- kjul:50004402
MARC
008941114s1990 us 000a eng■090 ▼a569.806▼bR987s
■1001 ▼aNovak, Richard E.
■24510▼aSemiconductor Cleaning Technology/1989▼dRichard E. Novak.
■260 ▼aU.S.A.▼bThe Electrochemical Society▼c1990.
■300 ▼a399 p.▼c23 cm.
■9500 ▼b9500
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