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Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications
Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications
Detailed Information
- 자료유형
- 기사
- ISSN
- 15981657
- 저자명
- Hyo-Jin Nam
- 서명/저자
- Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications / Hyo-Jin Nam , 공저 SeongSoo Jang, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeong Jin, Il-Joo Cho, Jong-Uk Bu
- 발행사항
- 서울 : 대한전자공학회, 2005.
- 형태사항
- pp. 24-29
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60202583
MARC
008190108s2005 ulk aa eng■022 ▼a15981657
■1001 ▼aHyo-Jin Nam
■24510▼aSilicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensors for SPM Data Storage Applications▼dHyo-Jin Nam▼e공저 SeongSoo Jang, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeong Jin, Il-Joo Cho, Jong-Uk Bu
■260 ▼a서울▼b대한전자공학회▼c2005.
■300 ▼app. 24-29
■500 ▼a참고문헌 수록
■7001 ▼aSeongSoo Jang, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeong Jin, Il-Joo Cho, Jong-Uk Bu
■773 ▼tJournal of Semiconductor Technology and Science▼gVolume 5, Number 1, (2005 March)▼d2005, 03
■856 ▼ahttp://www.jsts.org
■SIS ▼aS013705▼b60054120▼h8▼s2▼fP
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