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Modeling of Mechanical Behavior of Microcantilever due to Intrinsic Strain during Deposition
Modeling of Mechanical Behavior of Microcantilever due to Intrinsic Strain during Deposition
Detailed Information
- 자료유형
- 기사
- ISSN
- 1738494X
- 저자명
- Sang-Hyun Kim.
- 서명/저자
- Modeling of Mechanical Behavior of Microcantilever due to Intrinsic Strain during Deposition / Sang-Hyun Kim. , Sathyanarayanan Mani , James G. Boyd IV.
- 발행사항
- 서울 : 대한기계학회, 2006.
- 형태사항
- pp. 1646-1652
- 기타저자
- Sathyanarayanan Mani
- 기타저자
- James G. Boyd IV.
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60095163
MARC
008070326s2006 ULKa a ENG■022 ▼a1738494X
■1001 ▼aSang-Hyun Kim.
■245 ▼aModeling of Mechanical Behavior of Microcantilever due to Intrinsic Strain during Deposition▼dSang-Hyun Kim.▼eSathyanarayanan Mani▼eJames G. Boyd IV.
■260 ▼a서울▼b대한기계학회▼c2006.
■300 ▼app. 1646-1652
■653 ▼aMODELING▼aMECHANICAL▼aBEHAVIOR▼aMICROCANTILEVER▼aDUE▼aINTRINSIC▼aSTRAIN▼aDEPOSITION
■7001 ▼aSathyanarayanan Mani
■7001 ▼aJames G. Boyd IV.
■773 ▼tJournal of Mechanical Science and Technology▼gVol. 20 (No. 10)▼d2006, 10
■SIS ▼aS035048▼b60064619▼h8▼s2
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